As the first demonstrator of its kind in the industry, it enables an intuitive exploration of how the algorismic software optimizes resource consumption in the subfab. This makes it possible to experience how intelligent software increases efficiency, lowers costs and reduces the CO₂ footprint.
Pursuing climate targets and becoming more economical in the process - decision with impact
The semiconductor industry is facing a major challenge: achieving its ambitious climate targets and reducing costs at the same time. Fab operators must react quickly to these framework conditions, test new solutions and minimize the risks, costs and time required for implementation.
The software solution
Subfab360 ATC is an innovative software solution developed to increase environmental sustainability in semiconductor production. It enables savings in energy and resources in the subfab, resulting in a significant reduction in CO₂ emissions. Semiconductor manufacturers use the software to control their abatements and pumps in real time based on data from the fab's process tools. Subfab360 ATC is manufacturer-independent and offers simple interfaces for seamless integration of process equipment and subfab devices.
The technological requirements in fabs are high - safety and reliability have top priority. Algorismic has already carried out several successful implementations with Subfab360 ATC in Taiwan and Germany and, thanks to case studies, has collected real data on resource savings. These results can now be experienced interactively for the first time in the Subfab360 ATC Playroom. This enables decision-makers to make a realistic assessment of how efficient and effective an implementation is in their own company.
The demonstrator: Subfab360 ATC Playroom
"The implementation of Subfab360 ATC is no longer an experiment - it is based on real practical experience, has already proven its effectiveness many times over and has been shown to open up considerable savings potential. This makes it a logical and sensible solution for any fab that wants to combine efficiency and sustainability."
Tony Kühn, Director Project Management, algorismic gmbh
The web application makes it possible to experience complex relationships interactively and vividly:
- The visualization shows a fab - above in the clean room the production tool (e.g. for etching processes), below in the subfab the abatement equipment with scrubber and pumps.
- Without information about the gas flows from the production tool and the pumps, the abatement equipment runs at full load - resource consumption always remains at its maximum.
- When the software is activated, the abatement system receives real-time information on gas quantities and types from the production tool. This allows it to precisely adjust the energy requirement for combustion.
- In Savings Reporting, the savings achieved can be evaluated transparently and then translated into monetary values.
Making efficiency potential visible
When the considerable savings potential in the subfab is clearly demonstrated to decision-makers, a much more sound basis is created for the sustainable decision to use Active Tool Coupling (ATC). Only through the tangible interplay of software functionality and the realizable resource and cost savings does it become clear how sensible the implementation of "Subfab360 ATC" is.
Launch at SEMICON Taiwan 2025
At the algorismic gmbh stand at SEMICON Taiwan 2025, German Pavilion in Hall 1, interested parties can experience the software solution interactively in the Subfab360 ATC Playroom and view the underlying case study data.
Contact person:
Stefanie Hammer, General Manager
algorismic gmbh
Cottaer Str. 4, 01159 Dresden, Saxony, Germany
phone: +49 351 82 44 30
mail: info@algorismic.com
Would you like to find out more about how Subfab360 ATC makes efficiency potential visible while reducing costs and the carbon footprint?
Our experts will show you what savings are realistically possible in your fab and how to implement them.