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SEMICON TAIWAN 2024

Fab-proven software solution empowers semiconductor manufacturers in achieving their environmental goals

Energy and resource reduction potential in the subfab

As a step towards advancing environmental responsibility, semiconductor fabs need to have a closer look on their subfabs where large amounts of fuel gas, oxygen, compressed air, lye, cooling, and fresh water are consumed as part of the production process. An innovative open-source-based software solution is now launched to the market, designed to optimize energy efficiency and reduce CO2 emissions in subfabs by applying Advanced Tool Coupling (ATC). Subfab360 ATC, developed by the German algorismic gmbh, is presented by General Manager Stefanie Hammer during SEMICON Taiwan at the Semiconductor Sustainability Summit on September 4th.

Summary

• Innovative open-source-based software solutions for semiconductor industry post-process materials handling 
• Optimizing energy efficiency and CO2 footprint in subfabs with Subfab360 ATC
• Field tests show that Subfab360 ATC delivers significant energy savings compared to systems without active tool coupling
• The solution is manufacturer-independent and can be seamlessly integrated into existing IT fab systems
• The savings potential for subfab equipment is significant: Oxygen and fuel gas have been reduced by more than 60%, compressed air and water by 40%, fresh water and lye by more than 10%

Secure, manufacturer-independent software solution allows real-time control over media consumption in subfabs

The cutting-edge technology provides semiconductor manufacturers with real-time control over their abatements in subfab operations. Software solution Subfab360 ATC is manufacturer-independent and seamlessly integrates with existing IT fab systems, offering a data-driven approach to reducing environmental impact while enhancing operational efficiency. Through demand-based abatement control, this solution not only optimizes performance but also achieves measurable reductions in energy consumption, leading to substantial cost savings.

Semiconductor manufacturers use the software to control their abatements and pumps in real time based on data from coating and etching systems. Subfab360 ATC offers simple interfaces (e.g. Ethernet) for smooth integration of process equipment and subfab devices. This Active Tool Coupling (ATC) is already successfully used in volume production of semiconductors to minimize environmental impact while maximizing operational efficiency. 

The saving potential is unlocked through demand-based abatement control and the use of real-time data. The operating principle of Subfab360 ATC is that deposition processes require less fuel gas than clean processes. Energy savings are achieved through multiple burner modes and sleep mode, activated based on real-time data for demand-based abatement control. Open-source-based software Subfab360 ATC is a complete and self-contained on-premise solution, manufacturer-independent, with safety signals as fallback. It has been successfully used in volume production.

„We are excited to advance our vision of an innovative and environmentally conscious semiconductor industry with our software solution. By integrating this software into the subfab infrastructure, we will increase the environmental efficiency of our customers worldwide.“ 

Stefanie Hammer, General Manager, algorismic gmbh

Field data show outstanding instant media reductions 

Field tests at a semiconductor fab, realized over the last 12 months, show that Subfab360 ATC delivers significant energy savings compared to systems without active tool coupling. Oxygen and fuel gas have been reduced by more than 60%, compressed air and water by 40%, fresh water and lye by more than 10%.

Mehr Informationen zu Subfab360 ATC